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Molecular Design of Fluorocarbon Film Architecture by Pulsed Plasma Enhanced and Pyrolytic Chemical Vapor Deposition

Scott J. Limb; Kenneth K. S. Lau; David J. Edell; Edward F. Gleason; Karen K. Gleason

作者Scott J. Limb; Kenneth K. S. Lau; David J. Edell; Edward F. Gleason; Karen K. Gleason
卷第4卷
期第1期
印刷ISSN1084-0184
电子ISSN1572-8978
文件大小513.10KB
发表时间1999-03
DOI10.1023/a:1021899414807
页码21-32