Optical emission study of ablation plasma plume in the preparation of diamond-like carbon films by KrF excimer laser

• 作者Yamagata, Y.; Sharma, A.; Narayan, J.; Mayo, R. M.; Newman, J. W.; Ebihara, K.
• 卷第86卷
• 期第8期
• 印刷ISSN0021-8979
• 文件大小338.76KB
• 发表时间1999
• DOI10.1063/1.371340