A molecular dynamics simulation of ultrathin oxide films on silicon: Growth by thermal O atoms and sputtering by 100 eV Ar+ ions
Kubota, A.; Economou, D.J.
- 作者Kubota, A.; Economou, D.J.
- 卷第27卷
- 期第5期
- 印刷ISSN0093-3813
- 电子ISSN1939-9375
- 文件大小449.97KB
- 发表时间1999
- DOI10.1109/27.799820
- 页码1416-1425