High resolution thickness and interface roughness characterization in multilayer thin films by grazing incidence X-ray reflectivity

• 作者Isao Kojima; Boquan Li; Toshiyuki Fujimoto
• 印刷ISSN0040-6090
• 文件大小144.22KB
• 发表时间1999
• DOI10.1016/s0040-6090(99)00544-1
• 页码385-389