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Determination of the equivalent circuit of inductively coupled plasma sources

Determination of the equivalent circuit of inductively coupled plasma sources

Colpo, Pascal; Ernst, Roland; Rossi, F.

作者Colpo, Pascal; Ernst, Roland; Rossi, F.
卷第85卷
期第3期
印刷ISSN0021-8979
文件大小351.51KB
发表时间1999
DOI10.1063/1.369268

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