Spin-on Cu films for ultralarge scale integrated metallization

Murakami, Hirohiko; Hirakawa, Masaaki; Ohtsuka, Yoshiro; Yamakawa, Hiroyuki; Imazeki, Nobuya; Hayashi, Shigeo; Suzuki, Toshihiro; Oda, Masaaki; Hayashi, Chikara

期刊名称Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
作者Murakami, Hirohiko; Hirakawa, Masaaki; Ohtsuka, Yoshiro; Yamakawa, Hiroyuki; Imazeki, Nobuya; Hayashi, Shigeo; Suzuki, Toshihiro; Oda, Masaaki; Hayashi, Chikara
卷第17卷
期第5期
印刷ISSN0734-211X
文件大小842.58KB
发表时间1999
DOI10.1116/1.590911

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Spin-on Cu films for ultralarge scale integrated metallization