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[IEEE Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) - Orlando, FL, USA (1999.01.21-1999.01.21)] Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) - Flip-chip assembly for Si-based RF MEMS

[IEEE Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) - Orlando, FL, USA (1999.01.21-1999.01.21)] Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) - Flip-chip assembly for Si-based RF MEMS

Harsh, K.F.; Zhang, W.; Bright, V.M.; Lee, Y.C.

作者Harsh, K.F.; Zhang, W.; Bright, V.M.; Lee, Y.C.
文件大小1147.88KB
发表时间1999
DOI10.1109/memsys.1999.746833
页码273-278

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