Quartz-to-Quartz Direct Bonding
- 期刊名称Journal of The Electrochemical Society
- 作者Rangsten, P.
- 卷第146卷
- 期第3期
- 印刷ISSN0013-4651
- 文件大小64.77KB
- 发表时间1999
- DOI10.1149/1.1391728
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