Electrical characteristics of Ta[sub 2]O[sub 5] thin films deposited by electron beam gun evaporation
- 期刊名称Applied Physics Letters
- 作者Mikhelashvili, V.; Eisenstein, G.
- 卷第75卷
- 期第18期
- 印刷ISSN0003-6951
- 文件大小232.80KB
- 发表时间1999
- DOI10.1063/1.125166
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