[IEE IEE Seminar Microengineering, Modelling and Design - London, UK (4 March 1999)] IEE Seminar Microengineering, Modelling and Design - Design and modelling of polysilicon microswitches
- 作者McNie, M.E.
- 卷第1999卷
- 文件大小312.63KB
- 发表时间1999
- DOI10.1049/ic:19990277
- 页码6-6
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