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Dynamics of Mass Transfer on a Wafer Surface in Ozonated-Water Processing for Photoresist Removal

Dynamics of Mass Transfer on a Wafer Surface in Ozonated-Water Processing for Photoresist Removal

Narayanswami, Natraj; Nelson, S.
  • 期刊名称Solid State Phenomena
  • 作者Narayanswami, Natraj; Nelson, S.
  • 电子ISSN1662-9779
  • 文件大小275.53KB
  • 发表时间1999
  • DOI10.4028/www.scientific.net/SSP.65-66.157
  • 页码157-160
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