Automatic Focusing and Astigmatism Correction Method based on Fourier Transform of Scanning Electron Microscope Images
- 期刊名称Japanese Journal of Applied Physics
- 作者Ogasawara, Munehiro; Fukudome, Yuji; Hattori, Kiyoshi; Tamamushi, Shuichi; Koikari, Soshi; Onoguchi, Kazunori
- 卷第38卷
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小301.43KB
- 发表时间1999-2-15
- DOI10.1143/JJAP.38.957
- 页码957-960
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