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Properties and mutual interactions of various acrylate monomers used in 193 nm resists

Properties and mutual interactions of various acrylate monomers used in 193 nm resists

P.J. Paniez; F. Perrier; M. Panabiere; B. Mortini; C. Rosilio

作者P.J. Paniez; F. Perrier; M. Panabiere; B. Mortini; C. Rosilio
卷第46卷
印刷ISSN0167-9317
文件大小287.42KB
发表时间1999
DOI10.1016/s0167-9317(99)00114-8
页码393-396

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