SPIE Proceedings [SPIE Asia Pacific Symposium on Microelectronics and MEMS - Gold Coast, Australia (Wednesday 27 October 1999)] Design, Characterization, and Packaging for MEMS and Microelectronics - Programmable MEMS capacitor arrays
Duewer, Bruce E.; Wilson, John M.; Winick, David A.; Franzon, Paul D.; Courtois, Bernard; Demidenko, Serge N.
- 作者Duewer, Bruce E.; Wilson, John M.; Winick, David A.; Franzon, Paul D.; Courtois, Bernard; Demidenko, Serge N.
- 卷第3893卷
- 印刷ISSN0277-786X
- 文件大小1485.36KB
- 发表时间1999
- DOI10.1117/12.368433
- 页码262-271