Characterization of an Ar-TMS microwave discharge using mass spectrometry: effect of the reactor design on free-radical contents
J.L. Jauberteau; J. Aubreton; I. Jauberteau
- 作者J.L. Jauberteau; J. Aubreton; I. Jauberteau
- 卷第189卷
- 期第1期
- 印刷ISSN1387-3806
- 文件大小299.79KB
- 发表时间1999
- DOI10.1016/s1387-3806(99)00059-7
- 页码63-77