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[IEEE 2000 22nd International Conference on Microelectronics. Proceedings - Nis, Yugoslavia (14-17 May 2000)] 2000 22nd International Conference on Microelectronics. Proceedings (Cat. No.00TH8400) - Dielectric characteristics of MOS capacitors with rf sputtered Ta/sub 2/O/sub 5/

[IEEE 2000 22nd International Conference on Microelectronics. Proceedings - Nis, Yugoslavia (14-17 May 2000)] 2000 22nd International Conference on Microelectronics. Proceedings (Cat. No.00TH8400) - Dielectric characteristics of MOS capacitors with rf sputtered Ta/sub 2/O/sub 5/

Dimitrova, T.; Atanassova, E.; Koprinarova, J.

作者Dimitrova, T.; Atanassova, E.; Koprinarova, J.
卷第1卷
文件大小310.39KB
发表时间1999
DOI10.1109/icmel.2000.840592
页码373-376

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