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Hardness and Elastic Modulus Measurements of AIN and TiN Sub-Micron Thin Films Using the Continuous Stiffness Measurement Technique with Fem Analysis

Hardness and Elastic Modulus Measurements of AIN and TiN Sub-Micron Thin Films Using the Continuous Stiffness Measurement Technique with Fem Analysis

Rawdanowicz, T. A.; Sankar, J.; Narayan, J.; Godbole, V.

期刊名称MRS Proceedings
作者Rawdanowicz, T. A.; Sankar, J.; Narayan, J.; Godbole, V.
卷第594卷
电子ISSN1946-4274
文件大小898.69KB
发表时间1999-1
DOI10.1557/proc-594-507

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