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SPIE Proceedings [SPIE Asia Pacific Symposium on Microelectronics and MEMS - Gold Coast, Australia (Wednesday 27 October 1999)] Education in Microelectronics and MEMS - <title>Collaborative design software for MEMS</title>

SPIE Proceedings [SPIE Asia Pacific Symposium on Microelectronics and MEMS - Gold Coast, Australia (Wednesday 27 October 1999)] Education in Microelectronics and MEMS - Collaborative design software for MEMS

Tay, Francis E.; Payne, Fred; Parameswaran, M.
  • 作者Tay, Francis E.; Payne, Fred; Parameswaran, M.
  • 卷第3894卷
  • 印刷ISSN0277-786X
  • 文件大小1291.51KB
  • 发表时间1999
  • DOI10.1117/12.364514
  • 页码152-158
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