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SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] Micromachining and Microfabrication Process Technology V - <title>W-coating for MEMS</title>

SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] Micromachining and Microfabrication Process Technology V - W-coating for MEMS

Mani, Sita S.; Fleming, James G.; Sniegowski, Jeffry J.; Smith, James H.; Karam, Jean Michel
  • 作者Mani, Sita S.; Fleming, James G.; Sniegowski, Jeffry J.; Smith, James H.; Karam, Jean Michel
  • 卷第3874卷
  • 印刷ISSN0277-786X
  • 文件大小2762.68KB
  • 发表时间1999
  • DOI10.1117/12.361215
  • 页码150-157
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