SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] Micromachining and Microfabrication Process Technology V - Reproducibility data on SUMMiT
Limary, Siv; Stewart, Harold D.; Irwin, Lloyd W.; McBrayer, John; Sniegowski, Jeffry J.; Montague, Stephen; Smith, James H.; de Boer, Maarten P.; Jakubczak, Jerome F.; Smith, James H.; Karam, Jean Michel
- 作者Limary, Siv; Stewart, Harold D.; Irwin, Lloyd W.; McBrayer, John; Sniegowski, Jeffry J.; Montague, Stephen; Smith, James H.; de Boer, Maarten P.; Jakubczak, Jerome F.; Smith, James H.; Karam, Jean Michel
- 卷第3874卷
- 印刷ISSN0277-786X
- 文件大小1274.63KB
- 发表时间1999
- DOI10.1117/12.361210
- 页码102-112