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SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] Micromachining and Microfabrication Process Technology V - <title>Reproducibility data on SUMMiT</title>

SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] Micromachining and Microfabrication Process Technology V - Reproducibility data on SUMMiT

Limary, Siv; Stewart, Harold D.; Irwin, Lloyd W.; McBrayer, John; Sniegowski, Jeffry J.; Montague, Stephen; Smith, James H.; de Boer, Maarten P.; Jakubczak, Jerome F.; Smith, James H.; Karam, Jean Michel
  • 作者Limary, Siv; Stewart, Harold D.; Irwin, Lloyd W.; McBrayer, John; Sniegowski, Jeffry J.; Montague, Stephen; Smith, James H.; de Boer, Maarten P.; Jakubczak, Jerome F.; Smith, James H.; Karam, Jean Michel
  • 卷第3874卷
  • 印刷ISSN0277-786X
  • 文件大小1274.63KB
  • 发表时间1999
  • DOI10.1117/12.361210
  • 页码102-112
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