SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] MEMS Reliability for Critical and Space Applications - Development of characterization tools for reliability testing of micro-electro-mechanical system actuators
Smith, Norman F.; Eaton, William P.; Tanner, Danelle M.; Allen, James J.; Lawton, Russell A.; Miller, William M.; Lin, Gisela; Ramesham, Rajeshuni
- 作者Smith, Norman F.; Eaton, William P.; Tanner, Danelle M.; Allen, James J.; Lawton, Russell A.; Miller, William M.; Lin, Gisela; Ramesham, Rajeshuni
- 卷第3880卷
- 印刷ISSN0277-786X
- 文件大小4376.70KB
- 发表时间1999
- DOI10.1117/12.359365
- 页码156-164