SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] Micromachining and Microfabrication Process Technology V - Fabrication of plastic microparts on wafer level
- 作者Weber, Lutz; Ehrfeld, Wolfgang; Begemann, Marc; Berg, Udo; Michel, Frank; Smith, James H.; Karam, Jean Michel
- 卷第3874卷
- 印刷ISSN0277-786X
- 文件大小3183.71KB
- 发表时间1999
- DOI10.1117/12.361226
- 页码44-52
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