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Novel Dual Gate Oxide Process with Improved Gate Oxide Integrity Reliability

Novel Dual Gate Oxide Process with Improved Gate Oxide Integrity Reliability

Lee, Seok-Woo
  • 期刊名称Electrochemical and Solid-State Letters
  • 作者Lee, Seok-Woo
  • 卷第3卷
  • 期第1期
  • 印刷ISSN1099-0062
  • 文件大小613.26KB
  • 发表时间1999
  • DOI10.1149/1.1390957
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