Characterizing and monitoring thin-film processes with spectroscopic ellipsometry
- 作者Arun R. Srivatsa; Carlos L. Ygartua
- 卷第51卷
- 期第3期
- 印刷ISSN1047-4838
- 电子ISSN1543-1851
- 文件大小362.89KB
- 发表时间1999-03
- DOI10.1007/s11837-999-0026-6
- 页码34-36
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