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Sputter-induced cone and filament formation on InP and AFM tip shape determination

Sputter-induced cone and filament formation on InP and AFM tip shape determination

M. P. Seah; S. J. Spencer; P. J. Cumpson; J. E. Johnstone
  • 作者M. P. Seah; S. J. Spencer; P. J. Cumpson; J. E. Johnstone
  • 卷第29卷
  • 期第11期
  • 印刷ISSN0142-2421
  • 电子ISSN1096-9918
  • 文件大小634.28KB
  • 发表时间2000
  • DOI10.1002/1096-9918(200011)29:11<782::aid-sia929>3.0.co;2-1
  • 页码782-790
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