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Surface smoothing mechanism of gas cluster ion beams

Surface smoothing mechanism of gas cluster ion beams

Noriaki Toyoda; Norihisa Hagiwara; Jiro Matsuo; Isao Yamada

作者Noriaki Toyoda; Norihisa Hagiwara; Jiro Matsuo; Isao Yamada
印刷ISSN0168-583X
文件大小439.26KB
发表时间2000
DOI10.1016/s0168-583x(99)00771-5
页码980-985

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