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Structural, optical and electronic properties of hydrogenated polymorphous silicon films deposited at 150°C

Structural, optical and electronic properties of hydrogenated polymorphous silicon films deposited at 150°C

R Butté; S Vignoli; M Meaudre; R Meaudre; O Marty; L Saviot; P Roca i Cabarrocas
  • 作者R Butté; S Vignoli; M Meaudre; R Meaudre; O Marty; L Saviot; P Roca i Cabarrocas
  • 印刷ISSN0022-3093
  • 文件大小199.80KB
  • 发表时间2000
  • DOI10.1016/s0022-3093(99)00833-9
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