Large-diameter microwave plasma source excited by azimuthally symmetric surface waves
- 作者M. Tuda; K. Ono; H. Ootera; M. Tsuchihashi; M. Hanazaki; T. Komemura
- 卷第18卷
- 期第3期
- 文件大小505.73KB
- 发表时间2000
- DOI10.1116/1.582265
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