[IEEE 2000 Semiconductor Manufacturing Technology Workshop - Hsinchu, Taiwan (14-15 June 2000)] 2000 Semiconductor Manufacturing Technology Workshop (Cat. No.00EX406) - A tool portfolio planning methodology for semiconductor wafer fabs
Chung-En Kao, ; Y-C Chou,
- 作者Chung-En Kao, ; Y-C Chou,
- 文件大小499.29KB
- 发表时间2000
- DOI10.1109/SMTW.2000.883088
- 页码84-90