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[IEEE IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems - Miyazaki, Japan (23-27 Jan. 2000)] Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) - CMOS micromechanical bandpass filter design using a hierarchical MEMS circuit library

[IEEE IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems - Miyazaki, Japan (23-27 Jan. 2000)] Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) - CMOS micromechanical bandpass filter design using a hierarchical MEMS circuit library

Jing, Q.; Luo, H.; Mukherjee, T.; Carley, L.R.; Fedder, G.K.
  • 作者Jing, Q.; Luo, H.; Mukherjee, T.; Carley, L.R.; Fedder, G.K.
  • 文件大小734.58KB
  • 发表时间2000
  • DOI10.1109/memsys.2000.838514
  • 页码187-192
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