[IEEE IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems - Miyazaki, Japan (23-27 Jan. 2000)] Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) - Ultrasonically driven surface micromachined motor
Kaajakari, V.; Rodgers, S.; Lal, A.
- 作者Kaajakari, V.; Rodgers, S.; Lal, A.
- 文件大小793.78KB
- 发表时间2000
- DOI10.1109/memsys.2000.838487
- 页码40-45