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[IEEE 6th International Conference on Properties and Applications of Dielectric Materials - Xi'an, China (21-26 June 2000)] Proceedings of the 6th International Conference on Properties and Applications of Dielectric Materials (Cat. No.00CH36347) - Study on an effect of nitrogenation on microstructure properties of hydrogenated amorphous carbon films

[IEEE 6th International Conference on Properties and Applications of Dielectric Materials - Xi'an, China (21-26 June 2000)] Proceedings of the 6th International Conference on Properties and Applications of Dielectric Materials (Cat. No.00CH36347) - Study on an effect of nitrogenation on microstructure properties of hydrogenated amorphous carbon films

Rong Xingfu, ; Qin Zhiyu,
  • 作者Rong Xingfu, ; Qin Zhiyu,
  • 卷第2卷
  • 文件大小364.19KB
  • 发表时间2000
  • DOI10.1109/icpadm.2000.876178
  • 页码728-732
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