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Using neural networks to construct models of the molecular beam epitaxy process

Using neural networks to construct models of the molecular beam epitaxy process

Lee, K.K.; Brown, T.; Dagnall, G.; Bicknell-Tassius, R.; Brown, A.; May, G.S.

期刊名称IEEE Transactions on Semiconductor Manufacturing
作者Lee, K.K.; Brown, T.; Dagnall, G.; Bicknell-Tassius, R.; Brown, A.; May, G.S.
卷第13卷
期第1期
印刷ISSN0894-6507
文件大小421.85KB
发表时间2000
DOI10.1109/66.827338
页码34-45

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