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Optimal predictive control with constraints for the processing of semiconductor wafers on bake plates

Optimal predictive control with constraints for the processing of semiconductor wafers on bake plates

Weng Khuen Ho, ; Tay, A.; Schaper, C.D.
  • 期刊名称IEEE Transactions on Semiconductor Manufacturing
  • 作者Weng Khuen Ho, ; Tay, A.; Schaper, C.D.
  • 卷第13卷
  • 期第1期
  • 印刷ISSN0894-6507
  • 文件大小278.82KB
  • 发表时间2000
  • DOI10.1109/66.827348
  • 页码88-96
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