Influence of nitrogen and temperature on the deposition of tetrahedrally bonded amorphous carbon
- 期刊名称Journal of Applied Physics
- 作者Kleinsorge, B.; Ferrari, A. C.; Robertson, J.; Milne, W. I.
- 卷第88卷
- 期第2期
- 印刷ISSN0021-8979
- 文件大小372.75KB
- 发表时间2000
- DOI10.1063/1.373790