A gradational lead screw dry vacuum pump
- 期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
- 作者Akutsu, I.; Matsuoka, T.; Ozaki, M.; Kyuko, T.; Miyashita, S.; Ozawa, T.; Naka, M.; Ohnishi, H.; Narahara, Y.; Horikoshi, G.
- 卷第18卷
- 期第3期
- 印刷ISSN0734-2101
- 文件大小322.88KB
- 发表时间2000
- DOI10.1116/1.582298
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