Biased target deposition
- 期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
- 作者Zhurin, V. V.; Kaufman, H. R.; Kahn, J. R.; Hylton, T. L.
- 卷第18卷
- 期第1期
- 印刷ISSN0734-2101
- 文件大小290.90KB
- 发表时间2000
- DOI10.1116/1.582155
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