Structural properties and nitrogen-loss characteristics in sputtered tungsten nitride films
Y.G Shen; Y.W Mai; W.E McBride; Q.C Zhang; D.R McKenzie
- 作者Y.G Shen; Y.W Mai; W.E McBride; Q.C Zhang; D.R McKenzie
- 卷第372卷
- 印刷ISSN0040-6090
- 文件大小470.44KB
- 发表时间2000
- DOI10.1016/s0040-6090(00)01041-5
- 页码257-264