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Structural properties and nitrogen-loss characteristics in sputtered tungsten nitride films

Structural properties and nitrogen-loss characteristics in sputtered tungsten nitride films

Y.G Shen; Y.W Mai; W.E McBride; Q.C Zhang; D.R McKenzie
  • 作者Y.G Shen; Y.W Mai; W.E McBride; Q.C Zhang; D.R McKenzie
  • 卷第372卷
  • 印刷ISSN0040-6090
  • 文件大小470.44KB
  • 发表时间2000
  • DOI10.1016/s0040-6090(00)01041-5
  • 页码257-264
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