Nitrogen-Doping Effects on Electrical Properties of Hydrogenated Microcrystalline Silicon as Studied by Electron Paramagnetic Resonance and Conductivity

• 期刊名称Japanese Journal of Applied Physics
• 作者Ehara, Takashi; Amino, Tetsuya; Shinomiya, Hiroyuki; Ikoma, Tadaaki; Akiyama, Kimio; Tero-Kubota, Shozo
• 卷第39卷
• 印刷ISSN0021-4922
• 电子ISSN1347-4065
• 文件大小159.17KB
• 发表时间2000-1-15
• DOI10.1143/JJAP.39.31
• 页码31-34