Fabrication of a New Electrostatic Linear Actuator
- 作者T. Matsunaga; K. Kondoh; M. Kumagae; H. Kawata; M. Yasuda; K. Murata; M. Yoshitake
- 文件大小734.26KB
- 发表时间2000
- DOI10.1143/JJAP.39.7115
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