[IEEE 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 - Alpbach, Austria (17-22 Sept. 2000)] 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432) - Technical and economic considerations for retrograde well and channel implants
- 作者Morris, W.; Rubin, L.
- 文件大小364.20KB
- 发表时间2000
- DOI10.1109/iit.2000.924093
- 页码73-76
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