Deep RIE Process for Silicon Carbide Power Electronics and MEMS
- 期刊名称MRS Proceedings
- 作者Beheim, Glenn; Salupo, Carl S.
- 卷第622卷
- 电子ISSN1946-4274
- 文件大小633.96KB
- 发表时间2000-1
- DOI10.1557/proc-622-t8.9.1
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