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Doping of amorphous and microcrystalline silicon films by hot-wire CVD and RFPECVD at low substrate temperatures on plastic substrates

Doping of amorphous and microcrystalline silicon films by hot-wire CVD and RFPECVD at low substrate temperatures on plastic substrates

Alpuim, P.; Chu, V.; Conde, J.P.

期刊名称MRS Proceedings
作者Alpuim, P.; Chu, V.; Conde, J.P.
卷第609卷
电子ISSN1946-4274
文件大小237.70KB
发表时间2000-1
DOI10.1557/proc-609-a22.6

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