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SPIE Proceedings [SPIE International Symposium on Microelectronics and Assembly - Singapore, Singapore (Monday 27 November 2000)] Design, Modeling, and Simulation in Microelectronics - <title>Theoretical basis for including small as well as large deflections of quadratic membrane structures in one behavioral model</title>

SPIE Proceedings [SPIE International Symposium on Microelectronics and Assembly - Singapore, Singapore (Monday 27 November 2000)] Design, Modeling, and Simulation in Microelectronics - Theoretical basis for including small as well as large deflections of quadratic membrane structures in one behavioral model

Peters, Dagmar; Bolte, Hilmar; Marschner, Claudia; Rehfuss, Sven; Laur, Rainer; Courtois, Bernard; Demidenko, Serge N.; Lau, Lee Y.
  • 作者Peters, Dagmar; Bolte, Hilmar; Marschner, Claudia; Rehfuss, Sven; Laur, Rainer; Courtois, Bernard; Demidenko, Serge N.; Lau, Lee Y.
  • 卷第4228卷
  • 印刷ISSN0277-786X
  • 文件大小514.55KB
  • 发表时间2000
  • DOI10.1117/12.405438
  • 页码44-54
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