SPIE Proceedings [SPIE 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Munich, Germany (Monday 13 November 2000)] 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents - 130-nm node mask development
Chabala, Jan M.; Weaver, Suzanne; Alexander, David W.; Lu, Maiying; Kim, Nam-Wook; Cole, Damon M.
- 作者Chabala, Jan M.; Weaver, Suzanne; Alexander, David W.; Lu, Maiying; Kim, Nam-Wook; Cole, Damon M.
- 卷第4349卷
- 印刷ISSN0277-786X
- 文件大小654.22KB
- 发表时间2000
- DOI10.1117/12.425102