Penetration Hardness for Silicon Nitride Film Deposited Using Reactive Arc Ion Plating.
- 期刊名称Journal of the Surface Finishing Society of Japan
- 作者ISHIKAWA, Hiromi; FUDETANI, Shuichi; HIROHASHI, Mitsuji
- 卷第51卷
- 期第12期
- 印刷ISSN0915-1869
- 电子ISSN1884-3409
- 文件大小1078.34KB
- 发表时间2000
- DOI10.4139/sfj.51.1245
- 页码1245-1249
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