Characterization of CVD tungsten deposited by silane reduction
- 作者M. F. Bain; B. M. Armstrong; H. S. Gamble
- 卷第12卷
- 印刷ISSN0957-4522
- 电子ISSN1573-482X
- 文件大小696.72KB
- 发表时间2001-06
- DOI10.1023/a:1011296311900
- 页码327-331
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