[IEEE 2001 IEEE International Reliability Physics Symposium Proceedings. 39th Annual - Orlando, FL, USA (30 April-3 May 2001)] 2001 IEEE International Reliability Physics Symposium Proceedings. 39th Annual (Cat. No.00CH37167) - Reliability of a MEMS torsional ratcheting actuator
- 作者Tanner, D.M.; Walraven, J.A.; Barnes, S.M.; Smith, N.F.; Bitsie, F.; Swanson, S.E.
- 文件大小2132.98KB
- 发表时间2001
- DOI10.1109/RELPHY.2001.922886
- 页码81-90
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