Surface micromachined piezoelectric accelerometers (PiXLs)
- 期刊名称Journal of Microelectromechanical Systems
- 作者DeVoe, D.L.; Pisano, A.P.
- 卷第10卷
- 期第2期
- 印刷ISSN1057-7157
- 文件大小214.60KB
- 发表时间2001-6
- DOI10.1109/84.925733
- 页码180-186
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