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[IEEE Technical Digest MEMS 2001 14th IEEE International Conference on Micro Electro Mechanical Systems - Interlaken, Switzerland (21-25 Jan 2001)] Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) - Electrostatic batch assembly of surface MEMS using ultrasonic triboelectricity
Kaajakari, V.; Lal, A.
- 作者Kaajakari, V.; Lal, A.
- 文件大小691.72KB
- 发表时间2001
- DOI10.1109/memsys.2001.906466
- 页码10-13
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